发明名称 RADIOACTIVE-RAY SENSITIVE RESIN COMPOSITION
摘要 PURPOSE:To obtain a radioactive-ray sensitive resin composition which possesses the superior development performance, high sensitivity, heat resistance, and excellent left film rate and with which the generation of scum is effectively suppressed. CONSTITUTION:A radioactive-ray sensitive composition is characterized by the compounding of a compound represented by the formula I into the alkali- soluble resin. In the formula, D is a hydrogen atom or an organic group having a 1,2-quinone diazide group, and (p) is an integer of 0 or 1.
申请公布号 JPH04211255(A) 申请公布日期 1992.08.03
申请号 JP19910047694 申请日期 1991.02.20
申请人 JAPAN SYNTHETIC RUBBER CO LTD 发明人 KAJITA TORU;MIURA TAKAO;ISAMOTO YOSHITSUGU;OKUDA CHOZO
分类号 G03F7/022;G03F7/004;H01L21/027;H01L21/30 主分类号 G03F7/022
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