| 摘要 |
The method for producing a superconductive thin film is characterized by mixing Y2O3, Ba2CO3 and CuO, grinding the mixture for 12 hr to obtain a pellet, heat-treating the pellet at 900 deg.C for 9 hr and grinding it, mixing Y-Ba-Cu-O powder with Ag2O powder, pressure-molding the mixture to obtain a circular plate-shaped molded article, sintering the article under the oxygen atmosphere at 950 deg.C for 12 hr to obtain a composite target, depositing Y-Ba-Cu-O-Ag thin film of 1.5 μm thickness on the polycrystal yttria- stabilized- zirconia substrate, presputtering and growing the thin film for 3 hr, heat-treating it under the argon atmosphere at 900 deg.C for 10 min and under the oxygen atmosphere at 100 deg.C for 10 min, and furnace-cooling it.
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