PURIFICATION OF DILUTE GAS

摘要

PURPOSE:To obtain a high-purity purified dilute gas using simple device by combining an iron-zirconium alloy with sponge zirconium and bringing these combined metals into contact with dilute gas each at a prescribed temperature to remove impurities in the dilute gas. CONSTITUTION:Getter A of an alloy consisting of 5-40wt.% iron and 95-60wt.% zirconium and a getter B of sponge zirconium are prepared. Then, a dilute gas is brought into contact with the getter A at 600-800 deg.C and then with getter B at 500-700 deg.C. Thus, nitrogen, hydrocarbon, carbon monoxide, carbon dioxide, oxygen, hydrogen and steam contained as impurities in the dilute gas are removed.