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发明名称
GAS SCAVENGER
摘要
申请公布号
EP0264177(B1)
申请公布日期
1992.07.29
申请号
EP19870307347
申请日期
1987.08.19
申请人
SILICON VALLEY GROUP, INC.
发明人
TAYLOR, JERRY A., SR.
分类号
B01J4/00;C23C16/44;C23C16/56;H01L21/22
主分类号
B01J4/00
代理机构
代理人
主权项
地址
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