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发明名称
SEMICONDUCTOR ACCELERATION DETECTOR
摘要
申请公布号
JPH04206778(A)
申请公布日期
1992.07.28
申请号
JP19900337169
申请日期
1990.11.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAKEUCHI TAKANOBU;HAMAI TOSHIHARU
分类号
H01L21/60;H01L29/84
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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