| 摘要 |
PURPOSE:To prevent generation of defective work in a wire bonder by calculating a moving distance of capillary when the capillary abuts against electrodes from the counted value of an encoder including a motor which sways or moves a drive block in the vertical direction and then determining defective bonding using the result of calculation. CONSTITUTION:When a capillary 1 abuts against the bonding surface of electrodes, a proximity sensor 18 and a ultrasonic horn 6 provided in a drive block 11 are separated with each other and the proximity sensor 18 turns OFF by sensing this separation. Thereby, a moving distance calculating means calculates a moving distance capillary in this timing from a counted value of a rotary encoder 19. An irregular judging means executes comparative calculation for calculated distance obtained by the moving distance calculating means and a preset distance, namely the moving distance of capillary 1 when it normally abuts against the electrodes When a chip adheres to the capillary 1 and the capillary 1 does not abut normally against the electrodes, rotation of motor 20 is stopped by a motor control means and the bonding work of wire bonder is also stopped. |
