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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH04202659(A)
申请公布日期
1992.07.23
申请号
JP19900329602
申请日期
1990.11.30
申请人
FUJITSU LTD
发明人
YAMAGAMI AKIRA;KASHIWAGI SHIGEO
分类号
C23C14/34;C23C14/35;H01L21/285
主分类号
C23C14/34
代理机构
代理人
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