ALIGNING METHOD FOR DRILLING POSITIONS AND LASER DRILLING MACHINE

摘要

PURPOSE:To drastically improve working efficiency by comparing measured machined positions with the corresponding positional reference values to obtain an amount of deviation between the machined position and the positional reference value and moving a work based on the amount of deviation. CONSTITUTION:The central position of two beam fluxes with which the machining surface is irradiated is decided as the positional reference value. Each of the machining positions on the machining surface of the work W which is irradiated with two beam fluxes is measured by using measuring optics systems 70, 80. The measures machining positions are compared with the corresponding positional reference values to obtain an amount of deviation between the machining position and the positional reference value. The work W is moved based on the amount of deviation obtained. In this way, the machining positions with respect to the beam fluxes corresponding to the plural holes to be machined can be aligned concerning plural machining positions at the same time.