FORMATION OF PATTERN ALUMINUM ALLOY FILM,申请号JP19900335438-传众专利搜索

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发明名称	FORMATION OF PATTERN ALUMINUM ALLOY FILM
摘要
申请公布号	JPH04199512(A)	申请公布日期	1992.07.20
申请号	JP19900335438	申请日期	1990.11.28
申请人	APURAIDO MATERIARUZU JIYAPAN KK;MITSUBISHI ELECTRIC CORP	发明人	FUKUYAMA TOSHIHIKO;SAWAI HISAHARU;FUJIWARA NOBUO
分类号	H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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