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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH04199540(A)
申请公布日期
1992.07.20
申请号
JP19900335420
申请日期
1990.11.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
TANABE KYOKO;SUDA SHINJI
分类号
H01L21/82
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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