| 摘要 |
PURPOSE:To perform the title solid-phase welding in a high reliability at the low temperature and relatively high vacuum by a method wherein the surface of the connecting pad of a lead or device is laser or plasma irradiated in the low pressure atmosphere and then respective surfaces processed in the same atmosphere are subjected to ultrasonic welding with a fine wire. CONSTITUTION:A work 18 successively fed from the cassette 41 led into a vacuum chamber 34 is irradiated with plasma gas 20 from the inside of the quartz tube 21 in the microwaveguide 22 of a microwave transmitter 23. Simultaneously, the work 18 is irradiated with the laser beam 26 emitted from a laser oscillator 31. Thus, the work 18 purified by the plasma gas containing as well as the laser beam irradiation is carried to the position whereon a solid-phase welding device 33 is arranged so as to be subjected to solid-phase welding with a metallic fine wire 32 by an ultrasonic welding step without heating. Through these procedures, the title solid-phase welding in a high reliability at the low temperature i.e., the normal temperature-200 deg.C can be performed not necessarily in an ultrahigh vacuum atmosphere. |
