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发明名称
LARGE-SCALE INTEGRATED CIRCUIT
摘要
申请公布号
JPH04194681(A)
申请公布日期
1992.07.14
申请号
JP19900327766
申请日期
1990.11.27
申请人
NEC IBARAKI LTD
发明人
HASHIMOTO YOSHIAKI
分类号
G01R31/26;G01R31/28;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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