发明名称 COATING DEVICE
摘要 <p>PURPOSE:To prevent a coating liq. from being mixed with air bubbles and permit an appropriate amt. of the coating liq. to be replenished as required by a method wherein the existence of the bubbles mixed in the coating liq. being sent from a receiving container to a transparent pipe can be detected by a sensor. CONSTITUTION:A gas is sent pressurized from a nitrogen gas supply system 26 to a receiving container 24 contg. a coating liq. 23 therein to send out the coating liq. 23 from a pipe 16. The pipe 16 is at least partially provided with a transparent pipe 27 formed of a transparent body, whereby the existence of the bubbles 31 mixed in the coating liq. 23 being sent from a receiving container 34 to the transparent pipe 27 is detected by a sensor 30 consisting of a light emitting element 28 and a light receiving element 29. As a result, this method prevents the coating liq. from being mixed with the air bubbles and permits an appropriate amt. of the coating liq. to be replenished as required.</p>
申请公布号 JPH04190873(A) 申请公布日期 1992.07.09
申请号 JP19900321909 申请日期 1990.11.26
申请人 TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK 发明人 SHIRAISHI CHIHARU
分类号 G01V8/10;B05C5/00;B05C11/08;B05C11/10;G01N21/85;G03F7/16;H01L21/027;H01L21/30 主分类号 G01V8/10
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