发明名称 PHOTODEFINABLE INTERLEVEL DIELECTRICS
摘要 A predetermined pattern of a dielectric polymer is formed on a substrate from either a first prepolymer which is an ether of the reaction product of a dicyclopendadiene and a phenol or a mixture of said prepolymer with a second prepolymer which is an ether of the reaction product of a dialdehyde and 3 to 4 moles of a phenol.
申请公布号 WO9211580(A1) 申请公布日期 1992.07.09
申请号 WO1991US09392 申请日期 1991.12.11
申请人 ALLIED-SIGNAL INC. 发明人 ZUPANCIC, JOSEPH, JAMES;BLAZEJ, DANIEL, CHARLES;FRAENKEL, HOWARD, ALAN
分类号 C07C43/215;C08G61/00;C08G69/00;C08L61/04;C08L61/06;G03F7/027;G03F7/038;H01B3/36;H01L21/312;H01L23/498;H01L23/532;H05K1/00;H05K3/28;H05K3/46 主分类号 C07C43/215
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