发明名称 |
PHOTODEFINABLE INTERLEVEL DIELECTRICS |
摘要 |
A predetermined pattern of a dielectric polymer is formed on a substrate from either a first prepolymer which is an ether of the reaction product of a dicyclopendadiene and a phenol or a mixture of said prepolymer with a second prepolymer which is an ether of the reaction product of a dialdehyde and 3 to 4 moles of a phenol. |
申请公布号 |
WO9211580(A1) |
申请公布日期 |
1992.07.09 |
申请号 |
WO1991US09392 |
申请日期 |
1991.12.11 |
申请人 |
ALLIED-SIGNAL INC. |
发明人 |
ZUPANCIC, JOSEPH, JAMES;BLAZEJ, DANIEL, CHARLES;FRAENKEL, HOWARD, ALAN |
分类号 |
C07C43/215;C08G61/00;C08G69/00;C08L61/04;C08L61/06;G03F7/027;G03F7/038;H01B3/36;H01L21/312;H01L23/498;H01L23/532;H05K1/00;H05K3/28;H05K3/46 |
主分类号 |
C07C43/215 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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