| 摘要 |
PURPOSE:To improve the ionization efficiency by performing resonance excitation of beryllium vapor from the bottom state to semi-stable state through gas discharge then further performing resonance excitation from the excited state to the automatic ionization state through laser beam. CONSTITUTION:Beryllium vapor 10 to be inonized is led into a container 1 while laser beams B3, B4 are led through the window 3a, 3b. Then electrons produced through gas discharge are impinged against the vapor 10 between the electrodes 5, 6 to resonance excite from the bottom state to semi-stable state then further resonance excite from the excited state to the automatic ionization state under the ion production space 4 where said beams B3, B4 will cross by means of the beam B3 of 2,651Angstrom and the beam B4 of 3,865Angstrom to take out as an ion beam 9 composed only of beryllium under the voltage bwtween the electrodes 6 and 8a and irradiate against a specimen 8. Consequently, the ionization efficiency and the selectivity of ion can be improved considerably. |
