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发明名称
METHOD FOR EVALUATING A LITHIUM NIOBATE THIN FILM AND APPARATUS FOR PREPARING THE SAME
摘要
申请公布号
US5128007(A)
申请公布日期
1992.07.07
申请号
US19910691502
申请日期
1991.04.25
申请人
SHARP KABUSHIKI KAISHA
发明人
MATSUNAGA, HIRONORI;OHNO, HIROTAKA;OKAMOTO, YASUNARI
分类号
G01N21/31;C30B29/30;G01N21/21;G01N21/33;G01N21/84;G02B6/13
主分类号
G01N21/31
代理机构
代理人
主权项
地址
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