发明名称 SHAPE OF SEMICONDUCTOR WAFER
摘要 PURPOSE:To improve wafer yielding ratio from a crystal and enlarge effective dimension for photomask, by making a shape of a semiconductor wafer a square. CONSTITUTION:A wafer shape 10 is to be a square. A square-shaped wafer can be easily obtained by cutting vertically to the side of ribbon like crystal body obtained from a dendritic lifting method for instance. When the crystal is of the shape of ribbon, wafer yielding ratio can be improved and effective dimension for photomask can be enlarged.
申请公布号 JPS56131925(A) 申请公布日期 1981.10.15
申请号 JP19800034932 申请日期 1980.03.19
申请人 SUWA SEIKOSHA KK 发明人 YOSHIOKA TATSUAKI
分类号 H01L21/02;H01L29/06 主分类号 H01L21/02
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