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发明名称
METHOD OF MONITORING FILM THICKNESS DURING DEPOSITION PROCESS
摘要
申请公布号
SU1746213(A1)
申请公布日期
1992.07.07
申请号
SU19894700026
申请日期
1989.06.02
申请人
PROIZV OB "ZAVOD "ARSENAL"
发明人
ANTONYUK VLADIMIR N,SU;PISHCHAL ELINA I,SU
分类号
G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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