MANUFACTURE OF CRYSTALLINE SEMICONDUCTOR THIN FILM,申请号JP19900315418-传众专利搜索

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发明名称	MANUFACTURE OF CRYSTALLINE SEMICONDUCTOR THIN FILM
摘要
申请公布号	JPH04186721(A)	申请公布日期	1992.07.03
申请号	JP19900315418	申请日期	1990.11.20
申请人	SEIKO EPSON CORP	发明人	YAZAKI MASATOSHI
分类号	H01L21/20;H01L21/324;H01L21/84	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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