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发明名称
VERFAHREN ZUM HERSTELLEN EINER VERBINDUNGSSTRUKTUR VON EINER HALBLEITERANORDNUNG.
摘要
申请公布号
DE3586109(D1)
申请公布日期
1992.07.02
申请号
DE19853586109
申请日期
1985.02.08
申请人
FUJITSU LTD., KAWASAKI, KANAGAWA, JP
发明人
TUCHIYA, TAKAHIRO;TUKUDA, KAZUAKI ROOM 2501 FUJITSU-AOBASAI-R, YOKOHAMA-SHI KANAGAWA 227, JP;TAKADA, TADAKAZU, KAWASAKI-SHI KANAGAWA 213, JP;GOTO, HIROSHI, YOKOHAMA-SHI KANAGAWA 223, JP
分类号
H01L21/28;H01L21/3205;H01L21/768;H01L23/532;(IPC1-7):H01L21/90;H01L23/52
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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