Pressure measurement with gas friction vacuum meter - measuring time of delay of quartz vibration amplitude with vibrator isolated from oscillator

摘要

The pressure measurement method uses a gas friction vacuum meter fitted with an oscillator (2) and a quartz vibrator (1) as a sensor. The measurement value is derived from the pressure dependent damping of the quartz vibrations. For measurement value detection the oscillator is isolated from the quartz vibrator and the press. Value derived from the quartz's vibration decay. The time is measured for the vibration amplitude to fall between two fixed levels. USE/ADVANTAGE - Press. measurement method is improved to eliminate disadvantages such as errors introduced by analogue-to-digital converters.