| 摘要 |
PURPOSE:To improve durability and residual polarization retainability by superposing a ferroelectric layer and a metal ion supply layer on a first electrode on a substrate, then diffusing meal ions in the supply layer to the ferroelectric layer, and providing a second electrode on the supply layer. CONSTITUTION:A ferroelectric layer is formed on a first electrode on a substrate, and thereon a metal ion supply layer is superposed. Next, when a heat process is carried out in a short time the required amount of metal ions of the metal ion supply layer is diffused to the ferroelectric layer. When a second electrode is formed on the metal ion supply layer a ferroelectric thin film of which durability and residual polarization are improved is formed. |
