| 摘要 |
<p>PURPOSE:To shorten a processing time by correcting layout data, then segmenting only the corrected part of the data and replacing the data generated by the data processing only of that part with the corrected data of mask data before correction. CONSTITUTION:In the case of correcting the layout data and generating the mask data, the data processing only of the corrected part is executed so as to reduce the amount of processed data and shorten the processing time. The mask data of the corrected part generated in this processing and the mask data before the correction are synthesized to obtain the corrected mask data. For example, in the case that there is an error in the 1st level 21 of the layout data after generating the mask data and a graphic 42 obtained by correcting as graphic 41 before the correction is corrected, the corrected part of the 1st level 21 to the 4th level 24 of the layout data is segmented. A segmenting range 51 is extended to a little outside of the corrected part to execute segmenting. The segmented layout data 52 is arithmetically operated through the conversion of format, the transfer of data and the conversion of format, so that the mask data of the segmented part is obtained. Then, the data on the periphery is segmented and synthesized with the mask data before the correction.</p> |
