THIN FILM FORMING DEVICE,申请号JP19900310278-传众专利搜索

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法人/股东/高管

发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH04183852(A)	申请公布日期	1992.06.30
申请号	JP19900310278	申请日期	1990.11.16
申请人	SEIKO INSTR INC	发明人	SUZUKI MIZUAKI;KISHI MATSUO
分类号	C23C14/30	主分类号	C23C14/30
代理机构		代理人
主权项
地址

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