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发明名称
MANUFACTURE OF ANNEALING-PROTECTIVE FILM
摘要
申请公布号
JPH04180220(A)
申请公布日期
1992.06.26
申请号
JP19900309854
申请日期
1990.11.14
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YANAGIHARA MANABU;NISHII KATSUNORI
分类号
H01L21/265;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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