| 摘要 |
PURPOSE:To prevent flow of a gas into each of first, second and third chambers through small holes communicating these chambers with each other, and enhance the baking effect, by providing blocking means for stopping the flow of the gas into each chamber. CONSTITUTION:The device is provided with a first blocking means 30 for stopping flow of a gas into a first chamber 1 from a detected gas-presence side, a second blocking means 31 for stopping flow of the gas into a second chamber 2 from the adjoining first chamber, and a third blocking means 32 for stopping flow of the gas into a third chamber from the adjoining second chamber. This enables obtaining a molecular beam sampling apparatus capable of preventing degradation of an advantageous effect due to inflow of gas from an orifice 4 skimmer 5 and collimator 6 at the time of baking. |
