| 摘要 |
PURPOSE:To exclude the exposure of the thin film once formed due heat or electronic shock or the like and to realize an oxide conductive film whose characteristic is uniformized with excellent quality by forming an oxide superconducting thin film to both sides of a substrate simultaneously. CONSTITUTION:A board holder 2 supporting longitudinally a board 1, a couple of target holders 4a, 4b arranged at the side of the holder 2 and two couples of heaters 5a-5d arranged at the side of the holder 2 are accommodated in a chamber 6. The holder 2 supports the board 1 by the side face of the board and a circumferential ridge of the film forming face only. The target holders 4a, 4b support the targets 3a, 3b perpendicularly to the film forming face of the board 1. The heaters 5a-5d radiate and heat the board 1 almost from the side of the board 1 while avoiding a front face of the film forming face of the board 1. Through the constitution above, a superconducting microwave component use board having an excellent oxide superconducting thin film 12 at both sides of one ground board 11 is realized. |
