发明名称 Integrated sensor assembly.
摘要 <p>A method of making an integrated sensor is described wherein semiconductor array processing steps are performed on a circuit area of a silicon substrate to form a partially completed integrated sensor assembly. Following selection of a sensor from among a variety of sensor types, semiconductor processing steps from the sensor in a separate sensor area of the substrate, complete the array and interconnect the sensor with the array. &lt;IMAGE&gt;</p>
申请公布号 EP0491567(A1) 申请公布日期 1992.06.24
申请号 EP19910311771 申请日期 1991.12.18
申请人 HONEYWELL INC. 发明人 HAVILAND, JEFFREY S.
分类号 G01D21/00;G01K11/00;G01L1/00;G01L1/22;G01L9/00;G01L9/04;G01N5/00;G01N19/10;G01P15/08;G01R1/00;H01L27/118;H01L29/84;H01L43/08 主分类号 G01D21/00
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