| 摘要 |
PURPOSE:To shorten a time up to formation of film and to obtain a superconducting film having excellent characteristics by jetting oxide superconducting fine particles in a molten state together with a carrier gas to a substrate maintained at annealing temperature, bringing the particles into contact with the surface of the substrate and sticking. CONSTITUTION:In a production line A, mist evolved by a mist generator 4 together with a carrier gas is sent to a gaseous fluid transportation pipe 6 of a furnace 5, the mist is heated to remove water. Simultaneously with the operation, the dehydrated particle are burnt and reacted with an oxygen gas to form II oxide superconducting fine particles, a burnt material of constituent elements. The formed oxide superconducting particles are discharged together with a carrier gas from the gaseous fluid transportation pipe 6. Then the gaseous fluid is blown upon a substrate T maintained at an annealing temperature, the oxide superconducting fine particles in a molten state reach the surface of the substrate and collide against the surface in a kinetic energy in the jetting. Thereupon, the oxide superconducting particles are cooled by contact with the surface of the substrate T and the oxide superconducting particles are fast stuck to the surface of the substrate T and become a flame spraying film (superconducting film) S. |
