发明名称 Semiconductor device having organic film as interlayer insulating film for multilayer wirings
摘要 A semiconductor device which includes a semiconductor substrate, an element region formed on one of the principal surfaces of the semiconductor substrate with multilayer wiring structure having an organic film as an interlayer insulating film, a plurality of electrically conductive pillars formed in the periphery of the element region on the principal surface of the substrate, an organic interlayer insulating film formed between the plurality of electrically conductive pillars, and bonding pads formed on the plurality of electrically conductive pillars and extending from the upper layer wiring of the element region.
申请公布号 US5124781(A) 申请公布日期 1992.06.23
申请号 US19900492415 申请日期 1990.03.06
申请人 NEC CORPORATION 发明人 TASHIRO, TSUTOMU
分类号 H01L21/768;H01L23/522;H01L23/532 主分类号 H01L21/768
代理机构 代理人
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