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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04171734(A)
申请公布日期
1992.06.18
申请号
JP19900298679
申请日期
1990.11.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAKAMOTO SHINICHI;SONODA TAKUJI;KASAI NOBUYUKI
分类号
H01L21/822;H01L21/338;H01L27/04;H01L27/095;H01L29/78;H01L29/812
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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