Gas measurement with semiconductor sensor

摘要

Gas measurement involves measuring the temp. of a semiconductor sensor element, the conductivity of resistance of which is influenced by the gas to be measured. The novelty is that the process involves influencing the temp. and/or conductivity or resistance and/or covering of the sensor with gas by chemical action and/or detecting these as measured dimension. A phthalocyanine sensor is used for analysis of NOx in air. Other suitable sensors consist of Cu or Pb phthalocyanine or another semiconductor, e.g. Sn02, on a substrate of Si or A1203.