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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04170030(A)
申请公布日期
1992.06.17
申请号
JP19900297518
申请日期
1990.11.02
申请人
NEC YAMAGATA LTD
发明人
MURASE HIROSHI
分类号
H01L21/3213;H01L21/3205;H01L21/768
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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