发明名称 ARC PLASMA GENERATING METHOD AND FILM FORMING DEVICE
摘要 PURPOSE:To supply a plasma working gas to an arc and to obtain the board arc plasma by applying a magnetic field to counter electrodes having a prescribed shape to make the poles of the electrodes facing each other the same and generating the driving arc between the electrodes. CONSTITUTION:The arc 31 is generated between a pair of the electrodes 16 and 17 which have the end faces shaped to the flat cut ends of tubular bodies and face each other. Exciting coils 18, 19 are then energized to generate the magnetic fields to provide the same poles on the electrode surfaces facing each other, by which the above-mentioned arc 31 is magnetically driven and is circumrotationally moved on the cut ends of the tubular bodies on the end faces of the electrodes 16, 17. The plasma working gas 14 is supplied to the above-mentioned arc generating region g. Plural stages of the above-mentioned counter electrodes are provided from the upstream side to the downstream side of the above-mentioned working gas 14 and the arcs 31, 32 are circumrotationally moved on the cut ends to form the flat arc plasma 35. The powder of a thermal spraying material, etc., are entrained in a carrier gas 26 and are supplied from a supply port 27 into this plasma 35 to form a film 37 on a base material 36.
申请公布号 JPH04168260(A) 申请公布日期 1992.06.16
申请号 JP19900295721 申请日期 1990.10.31
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 SUZUKI SHIGEO;NOJIMA TAKASHI;TANAKA HIROYOSHI
分类号 C23C16/50;C23C4/12 主分类号 C23C16/50
代理机构 代理人
主权项
地址