发明名称 |
Grafted-crystal-film integrated optics and optoelectronic devices |
摘要 |
Integrated devices, comprising an optical waveguide in a substrate, are made by attaching a crystal film to the substrate. Such films can be made by an epitaxial lift-off technique which involves epitaxial growth on an auxiliary substrate, release of a grown single- or multi-layer film from the auxiliary substrate, and transfer of the released film to its intended location where lithographic patterning can be used for the production of devices accurately positioned relative to waveguides. Electrical contacts to devices can take the form of metallic layers which further can serve to secure film edges to the substrate.
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申请公布号 |
US5122852(A) |
申请公布日期 |
1992.06.16 |
申请号 |
US19900514914 |
申请日期 |
1990.04.23 |
申请人 |
BELL COMMUNICATIONS RESEARCH, INC. |
发明人 |
CHANG, WINSTON K.;YI-YAN, ALFREDO |
分类号 |
G02B6/13;G02B6/34;G02B6/42;H01L27/144 |
主分类号 |
G02B6/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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