METHOD OF CLEANING VAPOR GROWTH APPARATUS,申请号JP19900294060-传众专利搜索

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发明名称	METHOD OF CLEANING VAPOR GROWTH APPARATUS
摘要
申请公布号	JPH04167420(A)	申请公布日期	1992.06.15
申请号	JP19900294060	申请日期	1990.10.31
申请人	TOSHIBA CORP	发明人	SUGIURA RISA;SHIGENAKA KEITARO
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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