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发明名称
INSPECTING DEVICE FOR EXTERNAL APPEARANCE OF WAFER
摘要
申请公布号
JPH04165641(A)
申请公布日期
1992.06.11
申请号
JP19900292843
申请日期
1990.10.30
申请人
NEC CORP
发明人
KOMATSU ATSUSHI
分类号
G01N21/88;G01N21/94;G01N21/95;G01N21/956;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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