| 摘要 |
Halogenated metal beta-diketonate vapour stream is decomposed to form metal halide glass precursor by input of energy in a reaction zone. Decomposition effects deposition on adjacent substrate or within tubular substrate in optical fibre mfr.. O-Free metal halide is deposited below temp. to cause carbonisation. Prod. is pref. Be, Mg, Pb,Zn,Al, Zr, Hf or Ce chloride or esp. fluoride and can esp. comprise 85-100 mole % BeF2 and 0-15 AlF3. Feedstock pref. incorporates beta-diketonate ligands contg. 5-12C and is esp. derived from hexafluoroacetylacetonate. Energy input is pref. thermal or low-pressure plasma discharge of esp. microwaves or radio frequency.
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