SPUTTERING TARGET, METHOD AND DEVICE FOR SPUTTERING,申请号JP19900289233-传众专利搜索

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发明名称	SPUTTERING TARGET, METHOD AND DEVICE FOR SPUTTERING
摘要
申请公布号	JPH04165069(A)	申请公布日期	1992.06.10
申请号	JP19900289233	申请日期	1990.10.26
申请人	SANYO ELECTRIC CO LTD	发明人	MURATA YASUSHIGE
分类号	C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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