| 摘要 |
PURPOSE:To obtain a high quality data by locating the sample side focus points of incident and reflected ray curved monochrometers so that they are coincident with each other on the outer surface of a sample to be measured or inside thereof, and by measuring the diffraction angles and the intensities of the scattered rays from the sample to be measured. CONSTITUTION:The sample side focus point of an incident ray curved monochrometer 3 and the sample side focus point of a reflected ray curved monochrometer 7 are arranged so as that they are coincident with each other on the outer surface of a sample 5 to be measured. Further, X-rays having a focus line or divergent rays emitted from a ray source for corpuscular rays are led through a divergent angle limiting slit 2 and is diffracted at the monochrometer 3 so as to be turned into monochromatic light rays which are then irradiated onto the sample 5 by way of a divergent angle limiting slit 4. Of reflected light rays which are diverged in a cone-like shape, those passing through a divergent angle limiting slit 6 are diffracted at the monochrometer 7 and is turned into monochromatic rays. Then, the rays are converged into a line, and accordingly, only reflected rays passing through a light receiving slit 9 is detected by a detector 10. |
