发明名称 SEALING METHOD FOR SEMICONDUCTOR
摘要 PURPOSE:To increase a hardening speed, forming the most suitable guard ring, and make efficient resin sealing possible by, while sealing resin is supplied to the guard ring formation part of a circuit substrate, hardening the sealing resin by heating. CONSTITUTION:A laser irradiation tube 28 to receive laser energy from a laser source 24 as a heating source and produce laser light 26 as heating light is arranged near a syringe 20 as a supplier for sealing resin 16. The light 26 is applied to the resin 16 dropped on to a circuit substrate 2 from a needle 22 and the energy of the light 26 heats to harden the resin 16. That is, the hardening prevents the resin 16 from flowing and a guard ring 18 of sufficient height and strength within narrow ranges is formed. Thereby the ring 18 is made in a short time and hardened immediately to enough strength to fill the resin 16, therefore, the manufacturing time is shortened and manufacturing cost is decreased.
申请公布号 JPH04163926(A) 申请公布日期 1992.06.09
申请号 JP19900290352 申请日期 1990.10.26
申请人 NIPPON CHEMICON CORP 发明人 HAYASHI KOTARO
分类号 H01L21/56 主分类号 H01L21/56
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