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发明名称
SEMICONDUCTOR DEVICE PRODUCTION METHOD
摘要
申请公布号
JPH04163909(A)
申请公布日期
1992.06.09
申请号
JP19900291093
申请日期
1990.10.29
申请人
FUJITSU LTD
发明人
YAMAKAMI YURIKA
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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