ELECTRON BEAM LITHOGRAPHY APPARATUS,申请号JP19900287008-传众专利搜索

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发明名称	ELECTRON BEAM LITHOGRAPHY APPARATUS
摘要
申请公布号	JPH04162612(A)	申请公布日期	1992.06.08
申请号	JP19900287008	申请日期	1990.10.26
申请人	HITACHI LTD	发明人	MATSUOKA GENYA;IWASAKI TERUO;TAKAHASHI HIROYUKI;ANDO HIROZUMI;YAMAGUCHI HIDENORI;KAWASAKI KATSUHIRO
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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