| 摘要 |
PURPOSE:To suppress variation of an incident angle of a laser beam to beam- scan the surface of a workpiece within the specified angle range by rotating first and second reflection mirrors around mutually almost parallel axes by first and second reflection mirror driving means, respectively. CONSTITUTION:The laser beam 132 transmitted through a condenser lens 5 attains the first reflection mirror 9 and is reflected thereby and made incident on the second reflection mirror 7. The second reflection mirror 7 carries out amplitude motion with the oscillation central axis 11 as a center by a second reflection mirror driving pulse motor 8. Consequently, the laser beam 132 incident on the second reflection mirror 7 is reflected and the surface of the workpiece is irradiated with the laser beam while the amplitude motion being carried out. The workpiece 137 is irradiated with the laser beam 132 and moved by a moving device 138 to complete machining. As a result, regardless of a surface shape of the workpiece 137, the variation of the incident angle of the laser beam 132 to beam-scan the surface can be suppressed within the specified angle range. Accordingly, the surface of the workpiece can be machined uniformaly with the large machining width. |
