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发明名称
ION IMPLANTATION DEVICE
摘要
申请公布号
JPH04162336(A)
申请公布日期
1992.06.05
申请号
JP19900286166
申请日期
1990.10.24
申请人
NEC YAMAGATA LTD
发明人
SATO KATSUAKI
分类号
C23C14/48;H01J27/00;H01J37/08;H01J37/317;H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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