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经营范围
发明名称
ELECTRON BEAM DEVICE
摘要
申请公布号
JPH04162337(A)
申请公布日期
1992.06.05
申请号
JP19900284244
申请日期
1990.10.24
申请人
HITACHI LTD
发明人
IWASAKI TERUO;MATSUOKA GENYA
分类号
G01C3/06;H01J37/21;H01J37/305;H01L21/027
主分类号
G01C3/06
代理机构
代理人
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