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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04162472(A)
申请公布日期
1992.06.05
申请号
JP19900286170
申请日期
1990.10.24
申请人
NEC YAMAGATA LTD
发明人
TAKASHINA REIJI
分类号
H01L27/04;H01L21/822;H01L21/8222;H01L27/06
主分类号
H01L27/04
代理机构
代理人
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地址
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