摘要 |
PURPOSE:To ensure that purified water is supplied in a short time by refining purified water using precision filtering technique, then maintaining the water purity of the purified water at high level with a circulating system, supplying air into a purified water tank and supplying the purified water to a purification tank under pressure. CONSTITUTION:Untreated water is allowed to run through a device including more than one of a precision filtering device 3, an ultraviolet beam irradiation device 4, an ion exchange resin tower 5 and an ultrafiltering device 6 from an untreated water tank 1 for processing. Then the processed water is circulated to the untreated water tank 1 through a purified water tank 7. In addition, gas composed of more than either one of nitrogen, vapor and a rare gas is supplied to the purified water tank 7 from a solenoid valve 9 for pressurized air supply pipe. Following this process, the purified water is supplied under pressure to a batch-type purification device 11 from the purified water tank 7. As a result, the purified water of stable quality can be supplied easily and in a short time. |