| 发明名称 |
EXCIMER LASER USING HYDROGEN CHLORIDE, AND A METHOD OF PRODUCING HYDROGEN CHLORIDE FOR AN EXCIMER LASER |
| 摘要 |
Described is an excimer laser with a chamber (10) in which a gas discharge is produced with the assistance of hydrogen chloride. The laser has attachments with which the hydrogen chloride is produced by hydrolysis. |
| 申请公布号 |
WO9209126(A1) |
申请公布日期 |
1992.05.29 |
| 申请号 |
WO1991EP02185 |
申请日期 |
1991.11.19 |
| 申请人 |
LAMBDA PHYSIK GESELLSCHAFT SUR HERSTELLUNG VON LAS |
发明人 |
VOSS, FRANK;BASTING, DIRK;MELLER, A. |
| 分类号 |
H01S3/097;H01S3/036;H01S3/225 |
主分类号 |
H01S3/097 |
| 代理机构 |
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代理人 |
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| 主权项 |
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