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发明名称
METHOD AND DEVICE FOR FILM FORMATION
摘要
申请公布号
JPH04157179(A)
申请公布日期
1992.05.29
申请号
JP19900279701
申请日期
1990.10.18
申请人
HITACHI CABLE LTD
发明人
YAMAGUCHI KENJI
分类号
C23C28/02;C23C18/31;C25D5/34
主分类号
C23C28/02
代理机构
代理人
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地址
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